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 Exterior image of the Cymer Manufacturing office building. When Cymer Laser unveiled its latest breakthrough, the Master Oscillator
Power Amplifier (code named Raptor), their first thought was how
soon could we begin manufacturing. For Cymer, accelerated change
is a way of life. A scant 13-months after their breakthrough, the
company was ready to occupy the first phase of the newly constructed
facility where the next generation light source will be manufactured.
Syska Hennessy Group was brought on board to provide MEP and process
piping design service to Cymer, the world's leading supplier of
illumination sources essential for deep ultraviolet (DUV) photolithography.
Cymer is the supplier of excimer laser illumination sources, the
essential light source for deep ultraviolet (DUV) photolithography
systems used in the manufacturing of semiconductors. The project
consists of two phases:
Phase I: Manufacturing Facility and Central Plant
Phase I involves the shell and interior construction of a 42,000
sq. ft. production facility. To meet the demands of a fast track,
fast paced schedule, Syska Hennessy Group coordinated a dedicated
team of engineers who worked side-by-side and attended on-site
project meetings at least three out of five days each week to
ensure design excellence and quality control. The building was
operational within 10 months from beginning of design. The project
also include a 1,000-ton central chiller plant, 4 MW of power
generation plant and 15,000 kV UPS system. The central plant
will be approximately 15,000 sq ft.
Phase II: Manufacturing/Office Building and Parking Structure
Phase II consists of a 265,000 sq. ft. office building with a 40,000
sq. ft. ground-level production facility, and a 5-level underground
parking structure. The facility has a state-of-the-art training
center, lab, cafeteria, open and closed offices, a manufacturing
plant, 500 car parking garage, and an outdoor amphitheater.
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